ZONDA Hexapod

ZONDA Hexapod

HIGH ACCURACY AND HEAVY PAYLOAD


Accuracy, stability, large travel range


ZONDA hexapod is a new high-performance 6DOF system meeting applications requiring both high precision, stability, accuracy, heavy load and large travels.

Documents

ZONDA Datasheet

Travel range ± 200 mm / ± 20 °
Resolution 0.05 µm (50 nm)
Repeatability ± 0.5 µm
Payload 400 kg
Description

Details

Designed to position up to 400 kg payload with a resolution of 50 nm only, ZONDA hexapod offers great travel with 400 mm in XY, 300 mm in Z, and 40 ° in the three rotations Rx, Ry and Rz.

ZONDA hexapod has unmatched accuracy and thermal stability characteristics thanks to the integrating Invar components with a very low CTE (Coefficient of Thermal Expansion), linear absolute encoders integrated as a standard in the actuators and the design of particularly rigid joints.

ZONDA hexapod can be used in any orientation: vertical, horizontal, upside down…

Optionally, ZONDA hexapod can be high vacuum (10-6 mbar) or cleanroom compatible.

Applications

► Instrumentation

► Optics

► Test laboratories

► Aeronautics and spatial

► Metrology

► Synchrotrons

Name

ZONDA

Travel range Tx, Ty (mm) ± 200
Travel range Tz (mm) ± 150
Travel range Rx, Ry (deg) ± 20
Travel range Rz (deg) ± 20
Resolution Tx, Ty, Tz (nm) 0.1
Resolution Rx, Ry, Rz (μrad) 0.5
Repeatability Tx, Ty, Tz (nm) ± 0.5
Repeatability Rx, Ry, Rz (μrad) ± 2
Speed (mm/s; deg/s) 0.6; 0.04
Stiffness X, Y (N/μm) 8.5
Stiffness Z (N/μm) 30
Payload capacity (kg) 400 (vertical orientation)
140 (horizontal orientation)
Motor type Stepper
Encoder type Absolute linear encoder
Operating temperature range (°C) 0 to + 75
Materials Aluminum
steel
stainless steel
Invar
Peek
Size mobile platform (mm) Ø720
Height in middle position (mm) 640
Weight (kg) 99
Cable length (m) <5
Options Clean room compatibility
Vacuum compatibility
Customized platform design
Controller type ALPHA
Interface Ethernet, USB
Power supply 110-240 VAC / 50-60 Hz
Price Request a quote
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