NanoPos Piezo hexapod

NanoPos Piezo hexapod

PIEZO HEXAPOD WITH NANOMETER RESOLUTION

Documents

NanoPos Datasheet

Travel range ± 5 mm / ± 10°
Resolution 10 nm / 1 µrad
Repeatability ± 75 nm / ± 2 µrad
Payload 500 g
Description

Details

NanoPos is a miniature hexapod of 68 mm height for positioning and adjustment of precision components in 6 degrees of freedom with a 10 nm resolution.

NanoPos hexapod comes with outstanding characteristics for its small size thanks to the integration of extremely compact piezo stages of a known US manufacturer, high quality joints and low friction mechanical parts.

Its closed cloop control with linear optical encoders enables it to reach the highest precision performances.

HV and UHV versions are available.

Documents
View FileNanoPos 3D PDF    Size: (1.42 MB)
View FileNanoPos 3D STEP    Size: (3.2 MB)
Applications

► Instrumentation

► Optics

► Tests laboratories

► Microscopy

► Nanotechnologies

► Semiconductors

► Synchrotrons

Name

NanoPos

Travel range Tx, Ty (mm) ± 5
Travel range Tz (mm) ± 4
Travel range Rx, Ry (deg) ± 7
Travel range Rz (deg) ± 10
Resolution Tx, Ty, Tz (nm) 10
Resolution Rx, Ry, Rz (μrad) 1
Repeatability Tx, Ty, Tz (nm) ± 75
Repeatability Rx, Ry, Rz (μrad) ± 2
Speed (mm/s; deg/s) 1; 1
Payload capacity (g) 500 (vertical orientation)
Motor type Piezo motor
Operating temperature range (°C) + 5 to + 40
Materials Aluminum, invar, ceramic, stainless steel
Size mobile platform (mm) Ø72
Central aperture (mm) Ø32
Height in middle position (mm) 68
Weight (g) 505
Cable length (m) 1.2
Options Customized platform design
Larger travel range
Scalable size
Vacuum compatibility
Non magnetic
Controller type CAPELLA
Interface Ethernet, USB, Serial (RS-232)
Power supply 110-240 VAC / 50-60 Hz
Price Request a quote
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