NanoPos

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NanoPos

PIEZO HEXAPOD WITH NANOMETER RESOLUTION

Des documents	NanoPos Datasheet
Etendue Tx, Ty (mm)	± 5
Etendue Tz (mm)	± 4
Etendue Rx, Ry (deg)	± 7
Etendue Rz (deg)	± 10
Résolution Tx, Ty, Tz (nm)	10
Résolution Rx, Ry, Rz (μrad)	1
Répétabilité Tx, Ty, Tz (nm)	± 75
Répétabilité Rx, Ry, Rz (μrad)	± 2
Vitesse (mm/s; deg/s)	1; 1
Capacité de charge utile (g)	500 (vertical orientation)
Type de moteur	Piezo motor
Ecart de température de fonctionnement (°C)	+ 5 to + 40
Matériaux	Aluminum, invar, ceramic, stainless steel
Taille plate-forme mobile (mm)	Ø72
Ouverture centrale (mm)	Ø32
Hauteur en position médiane (mm)	68
Masse (g)	505
Longueur de câble (m)	1.2
Options	Customized platform design Larger travel range Scalable size Vacuum compatibility Non magnetic
Type de contrôleur	CAPELLA
Interface	Ethernet, USB, Serial (RS-232)
Source de courant	110-240 VAC / 50-60 Hz

Description: Détails

NanoPos is a miniature hexapod of 68 mm height for positioning and adjustment of precision components in 6 degrees of freedom with a 10 nm resolution.

NanoPos hexapod comes with outstanding characteristics for its small size thanks to the integration of extremely compact piezo stages from MICRONIX USA, high quality joints and low friction mechanical parts.

Its closed cloop control with linear optical encoders enables it to reach the highest precision performances.

HV and UHV versions are available.

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