ZONDA Hexapod

ZONDA Hexapod

HIGH ACCURACY AND HEAVY PAYLOAD


Accuracy, stability, large travel range


ZONDA hexapod is a new high-performance 6DOF system meeting applications requiring both high precision, stability, accuracy, heavy load and large travels.

Des documents

ZONDA Datasheet

Etendue ± 200 mm / ± 20 °
Résolution 0.05 µm (50 nm)
Répétabilité ± 0.5 µm
Charge 400 kg
Description

Détails

Designed to position up to 400 kg payload with a resolution of 50 nm only, ZONDA hexapod offers great travel with 400 mm in XY, 300 mm in Z, and 40 ° in the three rotations Rx, Ry and Rz.

ZONDA hexapod has unmatched accuracy and thermal stability characteristics thanks to the integrating Invar components with a very low CTE (Coefficient of Thermal Expansion), linear absolute encoders integrated as a standard in the actuators and the design of particularly rigid joints.

ZONDA hexapod can be used in any orientation: vertical, horizontal, upside down…

Optionally, ZONDA hexapod can be high vacuum (10-6 mbar) or cleanroom compatible.

Applications

► Instrumentation

► Optics

► Test laboratories

► Aeronautics and spatial

► Metrology

► Synchrotrons

Nom

ZONDA

Etendue Tx, Ty (mm) ± 200
Etendue Tz (mm) ± 150
Etendue Rx, Ry (deg) ± 20
Etendue Rz (deg) ± 20
Résolution Tx, Ty, Tz (nm) 0.1
Résolution Rx, Ry, Rz (μrad) 0.5
Répétabilité Tx, Ty, Tz (nm) ± 0.5
Répétabilité Rx, Ry, Rz (μrad) ± 2
Vitesse (mm/s; deg/s) 0.6; 0.04
Rigidité X, Y (N/μm) 8.5
Rigidité Z (N/μm) 30
Capacité de charge utile (kg) 400 (vertical orientation)
140 (horizontal orientation)
Type de moteur Stepper
Type de codeur Absolute linear encoder
Ecart de température de fonctionnement (°C) 0 to + 75
Matériaux Aluminum
steel
stainless steel
Invar
Peek
Taille plate-forme mobile (mm) Ø720
Hauteur en position médiane (mm) 640
Masse (kg) 99
Longueur de câble (m) <5
Options Clean room compatibility
Vacuum compatibility
Customized platform design
Type de contrôleur ALPHA
Interface Ethernet, USB
Source de courant 110-240 VAC / 50-60 Hz
Prix Request a quote
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