BORA

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BORA

MINIATURE HEXAPOD FOR HIGH ACCURACY POSITIONING

BORA hexapod is a compact 6DOF parallel kinematics system for the positioning and adjustment of precision elements with a resolution of 0.1 µm.

Travel range Tx, Ty (mm)	± 20
Travel range Tz (mm)	± 10
Travel range Rx, Ry (deg)	± 10
Travel range Rz (deg)	± 15
Resolution Tx, Ty, Tz (nm)	0.05
Resolution Rx, Ry, Rz (μrad)	1
Repeatability Tx, Ty (μm)	± 0.15
Repeatability Tz (μm)	± 0.15
Repeatability Rx, Ry, Rz (μrad)	± 2
Speed (mm/s; deg/s)	2; 2
Stiffness X, Y (N/μm)	1
Stiffness Z (N/μm)	10
Payload capacity (kg)	10 (vertical orientation) 5 (horizontal orientation)
Motor type	DC motor, gearhead
Operating temperature range (°C)	0 to + 50
Materials	Aluminum, steel, stainless steel
Size mobile platform (mm)	Ø160
Central aperture (mm)	Ø43 for mobile platform Ø36 for fixed platform
Height in middle position (mm)	145
Weight (kg)	4.3
Cable length, m	3
Options	Clean room compatibility Low temperature compatibility down to -40°C Vacuum compatibility
Controller type	ALPHA
Interface	Ethernet, USB
Power supply	110-240 VAC / 50-60 Hz

Description: Details

BORA hexapod meets the most demanding criteria of the optics and nanotechnologies in terms of resolution, accuracy, stability and size.

Its dimensions allows an integration in a small invironment, for instance at the tip of a goniometer for an application on synchrotron beamline, or on an optical ground support equipment to align and calibrate space optics.

BORA hexapod can be used in any orientation: vertical, horizontal, upside down…
Features: ► High vacuum compatibility down to 10-6 mbar

► Clean room compatibility
Applications: ► Instrumentation

► Optics

► Test laboratories

► Aeronautics and spatial

► Metrology

► Semiconductors

► Synchrotrons: sample, KB mirrors positioning

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